0-12.5mm 10mm 12mm/0.47" 25mm 25~35mm 30mm 35~65mm 50mm 65~135mm 75mm 100mm 120~280mm 200~600mm ±0.2mm ±0.3mm ±0.9mm ±1mm

1µm 3µm 5µm 20µm 30µm ±0.2+3×│L│³μm, (L is measuring length in mm) ±0.5%FS ±0.3+3×│L│³μm, (L is measuring length in mm) ±0.3%FS ±0.25%FS ±0.15%FS ±0.2%FS(＜400mm) ±0.3%FS(＞400mm) ±0.2%FS ±0.1%FS ±0.075%FS overall: ±2µm ±1%FS

capacitance inductance laser optical grating resistance